About this positionAt the forefront of Europe’s photonics innovation, TNO is building a state-of-the-art pilot line for Indium Phosphide (InP) photonic chips at the High Tech Campus in Eindhoven. As part of the EU-funded PIXEurope program, this pilot line will enable the transition from groundbreaking research to large-scale industrial manufacturing, making advanced photonic technologies faster, more reliable, and widely accessible.To help realize this ambitious step, we are looking for a Senior Process Engineer Lithography. In this role, you will develop, optimize, and industrialize DUV lithography processes that are critical for wafer-scale photonic chip production. With your deep understanding of lithography systems, resist processes, and pattern transfer, you will ensure that innovative research is translated into stable, scalable, and high-yield manufacturing processes.
What will be your role?As Senior Process Engineer Lithography, you are responsible for process development, optimization, and industrialization in a high-tech cleanroom environment. You focus on DUV lithography processes for 6-inch InP wafers, ensuring excellent critical dimension control, overlay performance, and process robustness. By working closely with R&D, equipment engineers, and QA teams, you enable stable production, continuous yield improvement, and the successful introduction of new lithography technologies into the pilot line.
Key responsibilities include:- Developing, qualifying, and optimizing DUV and i-line lithography processes for 6-inch InP wafer manufacturing.
- Setting up and scaling new lithography processes to industrial-level production, ensuring robustness and reproducibility.
- Analyzing process data, performing root cause analyses, and applying statistical methods such as SPC, FMEA, and DoE.
- Ensuring process stability, CD uniformity, overlay control, and high yield across the lithography module.
- Supporting operators and technicians with process-related issues to ensure smooth continuation of wafer manufacturing.
- Troubleshooting process disruptions and implementing corrective and preventive actions.
- Leading process improvement projects and supporting the introduction of new lithography tools and technologies.
- Collaborating closely in cross-functional teams (R&D, Equipment, QA) and reporting progress to management.
- Creating and maintaining process documentation, work instructions, and best practices.
- Mentoring junior engineers, acting as (acting) cluster lead when needed, and representing process engineering in multidisciplinary forums.
- A PhD, MSc, or BSc degree in physics, materials science, electrical engineering, chemistry, or a related field.
- 10+ years of experience in semiconductor process engineering, preferably in an industrial wafer fab environment.
- In-depth knowledge of DUV lithography systems and processes.
- Proven experience in setting up and industrializing new lithography processes.
- Strong background in process development, optimization, troubleshooting, and yield improvement.
- Familiarity with statistical process control and characterization methods (SPC, FMEA, DoE).
- Demonstrated leadership experience, for example as cluster lead or acting cluster lead.
- A mentoring and coaching mindset, with the ability to support junior colleagues and guide complex projects.
- A strategic and analytical approach, combined with strong communication and stakeholder management skills.
Challenging and varied work with a real impact. And plenty of opportunities as, at TNO, you are in charge of shaping your career. We offer a gross monthly salary between (based on your knowledge and experience), 8% holiday pay, a 13th month bonus of 8.33% and a flex budget (5.58% + € 180). In addition, you will be given every opportunity to develop yourself.
TNO offers optional employee benefits, enabling you to tailor your benefits package to match your personal situation.
You may also expect:- An extremely professional, innovative working environment where colleagues are leading experts in their field.
- The opportunity to attend courses, workshops and conferences, and to receive training and coaching based on your needs.
- 33 days annual leave plus a flexible holiday that can be used on a cultural, religious, or otherwise important day of your choosing (on a full-time basis).
- An employer working towards a respectful, inclusive, and equitable work environment where every employee can flourish, with various initiatives such as Jong TNO, numerous expertise based guilds, Rainbow Community and Round Tables on diverse inclusion topics.
- We offer a comprehensive and flexible mobility plan that also includes full compensation for public transportation for commuting and business travel.
- Great social events with your team and other TNO colleagues. That’s how you will get to know a lot of people really quickly.
- Flexible working hours, the possibility to work parttime (32 or 36 hours) and the possibility of working from home.
- Extensive relocation package for international candidates.
- A good pension scheme.
- Read more about tailoring your benefits package.
Our people are at the heart of TNO. Their curiosity, expertise and entrepreneurial mindset make it possible to deliver high-impact research and innovations that contribute to
#J-18808-Ljbffr€8000 - €12000 monthly





