Chemistry | Materials Science internship: EUV pellicle research

Introduction

In Materials and Chemistry Group within ASML Research, we are developing materials for the next generation of EUV pellicles. The function of the pellicle is to prevent particles from landing on the reticle during the lithography process, which is crucial for ensuring the imaging quality and throughput of our systems. At the same time, the pellicle must have a high transmission in the EUV while having good thermal stability and resistance to hydrogen plasma. A candidate material class that meets these requirements and is currently under investigation at ASML research are nanotube-based membranes.

Your Assignment

The current challenge is to understand the origin of the mechanical properties of these membranes in their pristine state, and after exposure to relevant stressors such as high temperatures and/or plasma environments. In this project you will:

• Learn about nanotube-based pellicle materials and their differences;
• Use a purpose built pellicle exposure tool to apply various stressors to small size pellicle samples;
• Analyze the effects of these stressors on the mechanical properties by means of bulge testing;
• Correlate these effects with other material changes to be characterized using techniques such as XPS, SEM and ellipsometry;
• Work independently in research labs;
• Join discussions with the pellicle research team and our suppliers to share your findings and think along about possible solutions;
• Write a report and present your conclusions and recommendations.

This is a Master internship for 6 months, working 5 days per week. The project is also suitable for a thesis, but with an extended duration of 9 months. The start date is as soon as possible.

Your Profile

To be a fit for this assignment, you:

• Are busy with your master's in Physics, Chemistry, Materials Science, Nanotechnology, or related;
• Have experience with some experimental work;
• Are proactive and have a hands-on mentality;
• Have good communication skills in English (verbal and written).

This position requires access to controlled technology, as defined in the United States Export Administration Regulations (15 C.F.R. § 730, et seq.). Qualified candidates must be legally authorized to access such controlled technology prior to beginning work. Business demands may require ASML to proceed with candidates who are immediately eligible to access controlled technology.

Inclusion and diversity

ASML is an Equal Opportunity Employer that values and respects the importance of a diverse and inclusive workforce. It is the policy of the company to recruit, hire, train and promote persons in all job titles without regard to race, color, religion, sex, age, national origin, veteran status, disability, sexual orientation, or gender identity. We recognize that inclusion and diversity is a driving force in the success of our company.

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